Custom machined graphite susceptor substrates with CVD SiC coating coordination for epitaxy, MOCVD, and wafer carrier applications that need dimensional control, purity review, and export-aware documentation.
Complete RFQs are easier to review within 1-2 business days when drawings, graphite grade, quantity, and destination are included.
| Option | Best Fit | Watchouts |
|---|---|---|
| Barrel susceptor or carrier | Multi-wafer epitaxy systems where pocket repeatability, balance, and locator features control process consistency. | Pocket depths, lift pins, coating buildup, and handling surfaces must be reviewed before machining release. |
| Pancake or single-wafer susceptor | Single-wafer epitaxy programs needing controlled flatness, edge geometry, and stable wafer seating. | Flatness and pocket dimensions should be specified after coating, not only on the bare graphite substrate. |
| MOCVD satellite carrier | Compound semiconductor and LED tooling with repeated small pockets, satellite fit, and thermal uniformity concerns. | Confirm pocket symmetry, rotation interface, cleaning method, and coating acceptance criteria early. |
Confirm grade, purity, pocket geometry, tolerances, coating allowance, and any sample-based dimensions.
Machine the bare substrate with coating-sensitive radii, pocket details, and fragile-feature handling.
Coordinate CVD SiC coating scope, document inspection expectations, and review dimensions after coating where required.
Protect coated edges, separate contact surfaces, and prepare certificates or export documents requested during RFQ.
| Metric | Typical Range | Why It Matters |
|---|---|---|
| Geometry basis | Buyer drawing, STEP file, or measured replacement sample | Susceptor pocket, locator, and rotation features are usually reactor-specific and cannot be treated as generic graphite parts. |
| Coating interface | Buyer-specified CVD SiC scope and acceptance criteria | Machining allowance and edge preparation affect post-coating fit, lifetime, and inspection acceptance. |
| Documentation level | Material, coating, inspection, packing, and export file by RFQ | Semiconductor buyers often need traceable records before a replacement component can enter production. |
We can review the full requirement, machine the graphite substrate, and coordinate coating and documents according to the RFQ scope.
A sample can support measurement, but production release still needs buyer confirmation of critical dimensions, coating acceptance, and reactor fit assumptions.
Clarify which dimensions are critical after coating, along with wafer size, pocket design, substrate grade, coating scope, and destination documentation.
Inquiry Email
Complete RFQs are easier to review within 1-2 business days when drawings, grade, quantity, and destination are included.
WhatsApp Alignment
+8618857971991
Use WhatsApp for quick alignment; send drawings by email for traceable review.
